Science and Technology of Nanolithography

Vrije Universiteit Amsterdam

Course Description

  • Course Name

    Science and Technology of Nanolithography

  • Host University

    Vrije Universiteit Amsterdam

  • Location

    Amsterdam, The Netherlands

  • Area of Study

    Computer Engineering, Computer Science, Information Technologies

  • Language Level

    Taught In English

    Hours & Credits

  • ECTS Credits

    3
  • Recommended U.S. Semester Credits
    1
  • Recommended U.S. Quarter Units
    2
  • Overview

    Course description

    In state-of-the-art nanolithography a mask containing the layout of a computer chip is imaged, using extreme ultraviolet (EUV) light, onto a thin layer of photo-resist on top of a semiconductor wafer from which the computer chips are fabricated. In this summer course we will follow the path that the light in said state-of-the-art nanolithography takes, and also address the challenges of illuminating wafers and precisely monitoring the imprints of nanostructures on the wafers.

    We will cover the surprisingly rich physics behind some of the fundamental processes occurring in Nanolithography. These range from the interaction of intense laser light with metals, the generation of plasmas, the generation of EUV light in plasmas, the creation of good mirrors out of badly reflecting materials, (sub-)nm metrology on semiconductor structures and the light sources needed for such metrology.

    Our contribution to this summer course is sharing our enthusiasm at the Advanced Research Center for Nanolithography (ARCNL) where we do exciting fundamental physics at the highest possible level with a relevance to key technologies in nanolithography. We wish to contribute to the production of ever smarter and smaller electronics, while at the same time pushing the boundaries of our fundamental insight into the workings of nature. This all starts with bright students! 

    Some further background: ARCNL is a public-private partnership between the University of Amsterdam, VU Amsterdam, the Dutch Research Council (NWO), and the semiconductor equipment manufacturer ASML. It combines the best of both worlds: the academic focus on scientific excellence and the industry's focus on a well-defined application areas.

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